Non-driven Micromechanical Gyroscopes and Their Applications

von: Fuxue Zhang, Wei Zhang, Guosheng Wang

Springer-Verlag, 2017

ISBN: 9783662540459 , 367 Seiten

Format: PDF, Online Lesen

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Non-driven Micromechanical Gyroscopes and Their Applications


 

Preface

5

About the Book

7

Contents

8

Author’s Introduction

13

Non-driven Mechanical Gyroscopes

15

1 Operating Theory of a Non-driven Mechanical Gyroscope

16

1.1 Characteristics of a Flying Aircraft

16

1.2 Motion Equation for the Sensitive Elements in a Non-driven Mechanical Gyroscope

22

1.3 Performance of the Gyroscope as the Aircraft Rotates With a Constant Angular Velocity

29

1.4 Choice of System Scheme for a Non-driven Mechanical Gyroscope

32

1.5 Dynamic Performance Regulation of the System

40

1.6 Stability of a Non-driven Mechanical Gyroscope with Negative Velocity Feedback

48

1.7 Technical Performance of a Non-driven Mechanical Gyroscope

69

2 Precision of a Non-driven Mechanical Gyroscope with Negative Velocity Feedback

71

2.1 Measurement Precision of a Constant Angular Velocity Rotating Around The Horizontal Axis

71

2.2 Regulation of a Non-driven Mechanical Gyroscope

92

3 Performances of Non-driven Mechanical Gyroscope in the Condition of an Alternating Angular Velocity

97

3.1 Performance of Non-driven Mechanical Gyroscope in the Condition of an Angular Vibration

98

3.2 Output Signal of Non-driven Mechanical Gyroscope in the Condition of an Angular Vibration

112

3.3 Measurement Accuracy of the Harmonic Angular Velocity for the Aircraft

117

3.4 Performance of Non-driven Mechanical Gyroscope in a Circumferential Vibration

141

4 The Operating Errors of a Non-driven Mechanical Gyroscope

148

4.1 Error Caused by Static Unbalance of the Framework

148

4.2 Error Caused by Angular Vibration and Circumferential Vibration

152

4.3 Error Caused by Imprecise Installation

154

4.4 Error Caused by Change of Environmental Temperature

157

Non-driven Micromechanical Gyroscopes

162

5 The Micromechanical Accelerometer and the Micromechanical Gyroscope

163

5.1 The Micromechanical Accelerometer

163

5.1.1 Basic Principle, Technology Type and Applications of a Micromechanical Accelerometer

163

5.1.2 The Working Principle of a Micromechanical Accelerometer

166

5.1.3 The Micromechanical Accelerometer Manufactured by a Bulk Micromachining Process

167

5.1.4 The Micromechanical Accelerometer Manufactured by a Surface Micromachining Process

171

5.1.5 Force Feedback

176

5.1.6 The Resonant Micromechanical Accelerometer

178

5.2 The Micromechanical Gyroscope

181

5.2.1 The Structural Basis of a Micromechanical Gyroscope

181

5.2.2 The Basic Principle of a Micromechanical Gyroscope

183

5.2.3 Frequency Bandwidth

186

5.2.4 Thermal Mechanical Noise

189

5.2.5 Types of Micromechanical Gyroscope

190

6 The Working Principle of a Non–Driven Micromechanical Gyroscope

197

6.1 The Structure Principle

197

6.2 The Dynamic Model

198

6.2.1 The Mass Vibrational Model

198

6.2.2 The Solution of the Angular Vibrational Equation

203

6.3 Analysis and Calculation of Kinetic Parameters

206

6.3.1 Torsion Stiffness of the Elastic Supporting Beam

206

6.3.2 Parameter Calculation of the Flexible Joints

207

6.3.3 The Damping Coefficient of Angular Vibration for the Vibrating Element

209

6.3.4 Relationship Between the Angular Vibration Natural Frequency, the Angular Vibration Amplitude and the Measured Angular Velocity

211

6.4 Signal Detection

212

6.4.1 The Relationship Between the Output Voltage and The Swing Angle

213

6.4.2 Signal Processing Circuit

215

6.5 ANSYS Simulation and Analogy

220

6.5.1 Modal Analysis

220

6.5.2 Frequency Response Analysis

221

7 Error of a Non-driven Micromechanical Gyroscope

223

7.1 Motion Equations of a Vibratory Gyroscope

223

7.2 Error Principle of a Vibratory Gyroscope

234

7.3 Error Calculation of a Non-driven Micromechanical Gyroscope

240

7.4 Error of a Non-driven Micromechanical Gyroscope

243

8 Phase Shift of a Non-driven Micromechanical Gyroscope

246

8.1 Phase Shift Calculation of a Non-driven Micromechanical Gyroscope

246

8.2 Phase Shift of a Non-driven Micromechanical Gyroscope

250

8.3 Feasibility of Adjusting the Position to Compensate the Phase Shift of the Output Signal

252

8.4 Characteristic Calculation of a Non-driven Micromechanical Gyroscope in the Angular Vibration Table

256

9 Static Performance Test of a Non-driven Micromechanical Gyroscope

260

9.1 Performance of the Prototype of a Non-driven Micromechanical Gyroscope

260

9.1.1 Temperature Performance of the Prototype

260

9.1.2 Performance of the Prototype

263

9.1.3 Temperature Stability of the Prototype

265

9.2 Performance of a CJS-DR-WB01 Type Silicon Micromechanical Gyroscope

266

9.3 Performance of a CJS-DR-WB02 Type Silicon Micromechanical Gyroscope

267

9.4 Performance Test of CJS-DR-WB03 Type Silicon Micromechanical Gyroscope

267

Applications of Non-driven Micromechanical Gyroscopes

291

10 Signal Processing

292

10.1 Inhibiting the Influence of a Change in Rolling Angular Velocity of the Rotating Body on the Stability of the Output Signal

292

10.1.1 Influence of a Change in Rolling Angular Velocity of the Rotating Body on the Output Signal

292

10.1.2 Method for Inhibiting the Influence of a Change in Rolling Angular Velocity on the Output Signal

292

10.1.3 Validation of Inhibiting Influence Method

295

10.2 The Attitude Demodulation Method of a Micromechanical Gyroscope Based on Phase Difference

299

10.2.1 Study of the Phase Difference Between the Output Signal and the Reference Signal of the Gyroscope

299

10.2.2 Factors Influencing Phase Difference

307

10.2.3 Phase Difference Compensating Method

314

10.3 Posture Demodulation of the Rotating Body Based on the Micromechanical Gyroscope

317

10.3.1 Demodulation Method

317

10.3.2 Simulation Experiment

328

11 Applications in the Flight Attitude Control System

331

11.1 Calculation Method Design and Software Creation

331

11.1.1 Calculation Method and Software

331

11.1.2 Computer Software Design

331

11.2 Influence Connected Motion (Angular Vibration) as Three Axes Move Simultaneously

335

11.3 DSP Digital Output of the Gyroscope

336

11.3.1 Hardware Circuit Design

336

11.3.2 Algorithm and Software Realization

337

11.3.3 Test Results

340

11.4 Attitude Sensing System for Single Channel Control of the Rotating Flight Carrier

343

11.5 Three Channels Attitude Sensing System of the Rotating Flight Carrier Through the Rectangular Coordinate Transformation

346

11.6 Attitude Sensing System of the Rotating Flight Carrier Through the Polar Coordinate Transformation

350

11.6.1 Method for Obtaining the Transverse Angular Velocity Relative to the Rotating Coordinate System of the Rotating Flight Carrier

352

11.6.2 Method for Obtaining the Rolling Angular Velocity Relative to the Coordinate System of the Quasi-Rotating Flight Carrier

354

11.6.3 Method for Obtaining the Pitch Angular Velocity and the Yaw Angular Velocity Relative to the Coordinate System of the Quasi-Rotating Flight Carrier

356

11.7 Applications in the Non-rotating Flight Carrier

357

References

359